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· Coaxial vertical scanning avoids obstructions. With a single frame of 90 mm, it delivers efficient large-field stitching.
· Supports detection of deep holes up to 130 mm deep with a 30:1 aspect ratio. It achieves one-shot measurement with an accuracy of ±2 mm.
· The coaxial optical path features superior angular performance for precise measurement of cutting edge radius and angles.
· Intelligently fits and calculates the radius of curved surfaces to eliminate manual measurement errors.
· Equipped with a rotary scanning structure to realize 3D profile measurement of inner hole walls.
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· Nanometer-level accuracy with full-area scanning over a 200×200 mm large field of view.
· Capable of measuring the parallelism of two sides on workpieces with steps up to 70 mm.
· Equipped with a spectral module to simultaneously inspect surface profile and roughness.
· Automatic measurement and intelligent judgment, ideal for full batch inspection.
· Proprietary optical path enables simultaneous dual-side scanning for accurate thickness and parallelism measurement.
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