Recrom Optics leverages mature micro-nano measurement and testing technologies to focus on semiconductor micro-nano processing, and has established in-depth cooperation with universities and research institutions. Equipped with a full suite of high-end micro-nano processing equipment covering the entire workflow of photolithography, etching and coating, the company supports processing from small substrates up to 12-inch wafers and is compatible with a wide range of substrate materials. We deliver one-stop customized solutions for micro-nano patterning, fully meeting the demands of both scientific research and industrial manufacturing.
I. Core Equipment Configuration
We are equipped with a full set of standardized high-end micro-nano processing devices that cover all core procedures of micro-nano fabrication. Our photolithography systems adopt mainstream international models such as EVG and Canon, supporting substrates ranging from small pieces to 12-inch wafers. Compatible with glass, silicon wafers, quartz and other common substrates, the equipment delivers stable machining accuracy and broad applicability, providing solid hardware support for high-precision fabrication of gratings and superstructures.
II. Core Fabrication Capabilities for Gratings and Superstructures
We offer professional customized fabrication services for gratings and superstructures, capable of mass production and R&D prototyping of diversified high-precision micro-nano structures. For gratings, we process mainstream types including surface relief gratings and volume gratings. For superstructures, we fabricate complex micro-nano periodic and aperiodic structures.
Supported by three core technologies — electron beam lithography, ion beam etching and nanoimprint lithography — we precisely control key parameters such as grating period, duty cycle and modulation depth, as well as the dimension and micro-morphology of superstructures. The finished products feature high structural regularity and excellent accuracy consistency.
We also provide one-stop post-processing services including substrate treatment, thin film deposition and precision calibration, with strict quality control throughout the entire workflow. Our products are widely applied in optical waveguides, spectroscopy, lasers, metamaterials and other key fields. Custom gratings and superstructures with various accuracies and specifications are available upon request.
III. Typical Fabrication Cases
Tantalum Pentoxide (Ta₂O₅) Superstructure: Custom fabrication of high-precision micro-nano superstructures in multiple batches
Gallium Nitride (GaN) Superstructure: Precision fabrication of semiconductor-based superstructures in diverse specifications
Recrom Optics — Specialized in Custom and Foundry Services for High-End Micro-Nano Patterns, Gratings and Superstructures