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Multi-surface Parallelism Measurement
Measurement Challenges:
· Traditional high-precision surface interferometers have insufficient imaging depth and cannot scan workpieces with multiple steps.
· Conventional 3D imaging equipment delivers low scanning accuracy.
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Geometric Tolerance Measurement
· Triangular optical scanning is susceptible to obstruction, causing shadow blind areas in 3D imaging.
· Laser confocal and depth-of-field synthesis imaging have inadequate depth of field, limiting the scanning range.
Angle and Radius R Measurement
· Traditional equipment features low resolution and fails to reconstruct complete 3D topography.
· The R value is selected manually, leading to poor repeat measurement accuracy.
Plane Step Height
· Linear profile inspection is easily affected by workpiece variations, resulting in large manual measurement errors.
· Traditional high-precision 3D scanners feature a narrow field of view.
Flatness & Planarity Measurement
· High inspection precision is required, which traditional equipment cannot achieve.
· The conventional stitching measurement method leads to low inspection efficiency.
Wafer TTV Bow Warp Measurement
· Traditional equipment lacks sufficient measurement accuracy to meet requirements.
· The conventional stitching inspection method results in low overall efficiency.
Deep Hole 3D Profile Measurement
· Triangular optical scanning is prone to obstruction, creating shadow blind spots in 3D imaging.
· Limited numerical aperture of the lens makes it challenging to measure deep holes with a high aspect ratio.
Non-transparent Top-Bottom Thickness Uniformity
· Transmissive 3D imaging is not applicable to non-transparent materials.
· Position offset often occurs during sampling on upper and lower surfaces, resulting in measurement errors.
Curved Surface R Measurement
· The inclined surface effect on curved surfaces degrades 3D imaging quality.
· Manual picking of passivation R values leads to low repeat measurement precision.
Technical Concept
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